JPH0230922Y2 - - Google Patents
Info
- Publication number
- JPH0230922Y2 JPH0230922Y2 JP2752480U JP2752480U JPH0230922Y2 JP H0230922 Y2 JPH0230922 Y2 JP H0230922Y2 JP 2752480 U JP2752480 U JP 2752480U JP 2752480 U JP2752480 U JP 2752480U JP H0230922 Y2 JPH0230922 Y2 JP H0230922Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- tuning fork
- vapor deposition
- metal mask
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 20
- 238000007740 vapor deposition Methods 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 16
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2752480U JPH0230922Y2 (en]) | 1980-03-03 | 1980-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2752480U JPH0230922Y2 (en]) | 1980-03-03 | 1980-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56130339U JPS56130339U (en]) | 1981-10-03 |
| JPH0230922Y2 true JPH0230922Y2 (en]) | 1990-08-21 |
Family
ID=29623488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2752480U Expired JPH0230922Y2 (en]) | 1980-03-03 | 1980-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230922Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4645551B2 (ja) * | 2006-08-03 | 2011-03-09 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び携帯電話装置 |
-
1980
- 1980-03-03 JP JP2752480U patent/JPH0230922Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56130339U (en]) | 1981-10-03 |
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